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Cited article:

Deep multilevel wet etching of fused silica glass microstructures in BOE solution

T. G. Konstantinova, M. M. Andronic, D. A. Baklykov, et al.
Scientific Reports 13 (1) (2023)
https://doi.org/10.1038/s41598-023-32503-w

Self-Controlled Cleaving Method for Silicon DRIE Process Cross-Section Characterization

Dmitry A. Baklykov, Mihail Andronic, Olga S. Sorokina, Sergey S. Avdeev, Kirill A. Buzaverov, Ilya A. Ryzhikov and Ilya A. Rodionov
Micromachines 12 (5) 534 (2021)
https://doi.org/10.3390/mi12050534