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The study of the mechanical properties of thin films using piezoceramic acoustic resonators

Andrey Teplykh, Boris Zaitsev, Irina Borodina, Alexander Semyonov, Mayya Ziangirova, Nailya Almyasheva, Alexander Golyshkin, Larissa Krasnopolskaya and Iren Kuznetsova

ITM Web Conf., 30 (2019) 07002

DOI: https://doi.org/10.1051/itmconf/20193007002

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