| Issue |
ITM Web Conf.
Volume 30, 2019
29th International Crimean Conference “Microwave & Telecommunication Technology” (CriMiCo’2019)
|
|
|---|---|---|
| Article Number | 04009 | |
| Number of page(s) | 6 | |
| Section | Information Technology in Telecommunications (3a) | |
| DOI | https://doi.org/10.1051/itmconf/20193004009 | |
| Published online | 27 November 2019 | |
Design ICCreatech semiconductor wafer accounting and probe measurement automatization software
1 Scientific-Research Institute of Semiconductor Devices JSC, 634034 Tomsk, Russia
2 Tomsk State University of Control Systems and Radioelectronics, 634050 Tomsk, Russia
Corresponding author: argunov dp@niipp.ru
The different manufacturing processes automatization and creating a modern digital document transferring system is an important problem for enhancing factory performance. This paper presents the results of developing an automated information system for manufacturing monolithic integrated circuits. Server and client solutions have been developed supported features of electronic covering documents, making automated on-wafer electrical characteristics measurement, and measurement data analysis.
© The Authors, published by EDP Sciences, 2019
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
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