| Issue |
ITM Web Conf.
Volume 30, 2019
29th International Crimean Conference “Microwave & Telecommunication Technology” (CriMiCo’2019)
|
|
|---|---|---|
| Article Number | 07005 | |
| Number of page(s) | 4 | |
| Section | Materials and Technology of Microwave Devices (5a) | |
| DOI | https://doi.org/10.1051/itmconf/20193007005 | |
| Published online | 27 November 2019 | |
Development of electrode structure for acoustic delay lines by using inject printing method
Kotel’nikov Institute of Radio Engineering and Electronics of RAS, Laboratory of Semiconductor Processes in Semiconductor Materials, 125009, Mokhovaya st., 11 bld.7, Moscow, Russia
* Corresponding author: andre-smirnov-v@vandex.ru
The results concerning to study of possibility to produce electrode structure of acoustic delay lines by using inject printing method are presented. The investigation of morphologic and structure characteristics of electrode structure produced has been carried out. The possibility of excitation of plate acoustic waves characterized by high value of electro-mechanical coupling coefficient by such acoustic delay lines has been demonstrated.
© The Authors, published by EDP Sciences, 2019
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