ITM Web of Conferences

The modeling design integral the electrostatic microelectromechanical switch of capacitive type

Igor E. Lysenko, Alexey V. Tkachenko, Olga A. Ezhova and Boris G. Konoplev

ITM Web Conf., 30 (2019) 06005

Published online: 27 November 2019

DOI: 10.1051/itmconf/20193006005

Igor E. Lysenko

Alexey V. Tkachenko

Olga A. Ezhova

Boris G. Konoplev

Articles written by ALL the selected authors (AND)

Articles written by ANY OF the selected authors (OR)