| Issue |
ITM Web Conf.
Volume 30, 2019
29th International Crimean Conference “Microwave & Telecommunication Technology” (CriMiCo’2019)
|
|
|---|---|---|
| Article Number | 06005 | |
| Number of page(s) | 10 | |
| Section | Passive Components (5) | |
| DOI | https://doi.org/10.1051/itmconf/20193006005 | |
| Published online | 27 November 2019 | |
The modeling design integral the electrostatic microelectromechanical switch of capacitive type
Southern Federal University, 347929, Taganrog, Russia
* Corresponding author: msqk@mail.ru
This article presents the optimization and static modeling of the design an integral microelectromechanical switch of capacitive type based on a parametric 3D model using finite element analysis software complex ANSYS. The values of the pull-down voltage and switching time are determined. The obtained results give a good theoretical help in the development of various high-performance electrostatic microelectromechanical switches.
© The Authors, published by EDP Sciences, 2019
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
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