ITM Web of Conferences

Digital Design as a Key Approach to Shortening MEMS Development Cycle

Mihail M. Androniс, Ilya A. Rodionov and Yurii B. Tsvetkov

ITM Web Conf., 35 (2020) 01003

Published online: 09 December 2020

DOI: 10.1051/itmconf/20203501003

Mihail M. Androniс

Ilya A. Rodionov

Yurii B. Tsvetkov

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