| Issue |
ITM Web Conf.
Volume 35, 2020
International Forum “IT-Technologies for Engineering Education: New Trends and Implementing Experience” (ITEE-2019)
|
|
|---|---|---|
| Article Number | 01003 | |
| Number of page(s) | 11 | |
| Section | Engineering Education Technology Based on Using Digital Resources | |
| DOI | https://doi.org/10.1051/itmconf/20203501003 | |
| Published online | 09 December 2020 | |
Digital Design as a Key Approach to Shortening MEMS Development Cycle
1
Bauman Moscow State Technical University, 2nd Baumanskaya str., 5/1, 105005, Moscow, Russia
2
Dukhov Automatics Research Institute (VNIIA), Sushchevskaya str., 22, 127055, Russia, Moscow, Russia
* Corresponding author: m_andronic@bmstu.ru
A comparative analysis of new product development principles in microelectronics, mechanical engineering, and MEMS production is carried out. A MEMS integrated digital modeling approach is proposed based on the formation of a knowledge base, including a description of basic structural elements and basic tested process sequences for their manufacture.
© The Authors, published by EDP Sciences, 2020
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
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