ITM Web Conf.
Volume 30, 201929th International Crimean Conference “Microwave & Telecommunication Technology” (CriMiCo’2019)
|Number of page(s)||5|
|Section||Nanoelectronics and Nanotechnology (5b)|
|Published online||27 November 2019|
Development of technology for producing nanowires on LiNbO3 piezoelectric plate surface
1 Kotel’nikov Institute of Radio Engineering and Electronics of RAS, Laboratory of Semiconductor Processes in Semiconductor Materials, 125009, Mokhovaya st., 11 bld.7, Moscow, Russia
2 M.V. Lomonosov Moscow State University, Department of Physics, 119991, Leninskie Gory, 1, Moscow, Russia
* Corresponding author: email@example.com
Integration of nanostructures with acoustic delay lines within planar technologies give the chance of development the acoustonanoelectronic sensors with high sensitivity and selectivity. An initial step in this direction is investigation of interaction of tunnel nanostructures with acoustic piezoactive waves propagating in piezoelectric substrates. In this work the technology of nanowire production on the surface of lithium niobate plate has been developed. This technology is based on using electronic lithography method with help an electronic beam in a raster electronic microscope. The nanostructure consisting of nanowire with size 20nm x 180nm was placed in the center between IDTs of acoustic delay line. The volt-ampere characteristics of this nanowire in presence and at the absence of the acoustic wave were meazured by picoampermeter. The analysis has shown that presence of piezoactive acoustic wave is influenced on electric current in a nanowire.
© The Authors, published by EDP Sciences, 2019
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