ITM Web Conf.
Volume 30, 201929th International Crimean Conference “Microwave & Telecommunication Technology” (CriMiCo’2019)
|Number of page(s)||5|
|Section||Nanoelectronics and Nanotechnology (5b)|
|Published online||27 November 2019|
Development of technology for producing nanowires on LiNbO3 piezoelectric plate surface
1 Kotel’nikov Institute of Radio Engineering and Electronics of RAS, Laboratory of Semiconductor Processes in Semiconductor Materials, 125009, Mokhovaya st., 11 bld.7, Moscow, Russia
2 M.V. Lomonosov Moscow State University, Department of Physics, 119991, Leninskie Gory, 1, Moscow, Russia
* Corresponding author: firstname.lastname@example.org
Integration of nanostructures with acoustic delay lines within planar technologies give the chance of development the acoustonanoelectronic sensors with high sensitivity and selectivity. An initial step in this direction is investigation of interaction of tunnel nanostructures with acoustic piezoactive waves propagating in piezoelectric substrates. In this work the technology of nanowire production on the surface of lithium niobate plate has been developed. This technology is based on using electronic lithography method with help an electronic beam in a raster electronic microscope. The nanostructure consisting of nanowire with size 20nm x 180nm was placed in the center between IDTs of acoustic delay line. The volt-ampere characteristics of this nanowire in presence and at the absence of the acoustic wave were meazured by picoampermeter. The analysis has shown that presence of piezoactive acoustic wave is influenced on electric current in a nanowire.
© The Authors, published by EDP Sciences, 2019
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.
Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.
Initial download of the metrics may take a while.