| Issue |
ITM Web Conf.
Volume 30, 2019
29th International Crimean Conference “Microwave & Telecommunication Technology” (CriMiCo’2019)
|
|
|---|---|---|
| Article Number | 08013 | |
| Number of page(s) | 6 | |
| Section | Nanoelectronics and Nanotechnology (5b) | |
| DOI | https://doi.org/10.1051/itmconf/20193008013 | |
| Published online | 27 November 2019 | |
Surface topologies of thin aluminum films and absorbing properties of metal dielectric structures in the microwave range
V.I. Vernadsky Crimean Federal University, 295007, Simferopol, Russia
* Corresponding author: mazinovas@cfuv.ru
The paper presents experimental and theoretical results on the surface topography of thin aluminum films. The ambiguous topology dynamics of the thin-film structure is represented as a function of the increase in the bulk mass of the deposited material, which leads to an occasional rise in roughness reaching its maximum at a film thickness of 7 nm. At same time on the same thickness of the conductive layer the maximum of the absorption coefficient variability is observed. A theoretical analysis of the optical coefficients depending on the size of the conductive film substantiated the existence of extremes, but at smaller thicknesses.
© The Authors, published by EDP Sciences, 2019
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